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Cited article:

Growth of Ru and RuO₂ films by metal-organic chemical vapour deposition

F. Fröhlich, D. Machajdik, V. Cambel, J. Fedor, A. Pisch, J. Lindner

J. Phys. IV France, 11 PR3 (2001) Pr3-325-Pr3-332

DOI: https://doi.org/10.1051/jp4:2001341

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