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Cited article:

Optical properties of silicon thin films related to LPCVD growth condition

M. Modreanu, M. Gartner, C. Cobianu, B. O'Looney and F. Murphy
Thin Solid Films 450 (1) 105 (2004)
https://doi.org/10.1016/j.tsf.2003.10.047

Investigation on preparation and physical properties of LPCVD SixOyNz thin films and nanocrystalline Si/SixOyNz superlattices for Si-based light emitting devices

M Modreanu, Mariuca Gartner and Dana Cristea
Materials Science and Engineering: C 19 (1-2) 225 (2002)
https://doi.org/10.1016/S0928-4931(01)00471-4