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Cited article:

Thermodynamic modeling of SiBCN film deposition from the gas phase in the Si—B—N—C—H system

V. A. Shestakov and M. L. Kosinova
Russian Chemical Bulletin 70 (2) 283 (2021)
https://doi.org/10.1007/s11172-021-3083-9

Thermodynamic modeling of BCN chemical vapor deposition from N-trimethylborazine + ammonia mixtures

A. N. Golubenko, M. L. Kosinova, A. A. Titov and F. A. Kuznetsov
Inorganic Materials 48 (7) 691 (2012)
https://doi.org/10.1134/S0020168512060039