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Cited article:

Field-Effect Control of Electroosmotic Pumping Using Porous Silicon–Silicon Nitride Membranes

S.K. Vajandar, Dongyan Xu, Jiashu Sun, et al.
Journal of Microelectromechanical Systems 18 (6) 1173 (2009)
https://doi.org/10.1109/JMEMS.2009.2031692

Highly moisture-resistive silicon nitride films prepared by catalytic chemical vapor deposition and application to gallium arsenide field-effect transistors

Atsushi Masuda, Masahiro Totsuka, Tomoki Oku, Ryo Hattori and Hideki Matsumura
Vacuum 74 (3-4) 525 (2004)
https://doi.org/10.1016/j.vacuum.2004.01.023

Recent progress of Cat-CVD research in Japan—bridging between the first and second Cat-CVD conferences

Hideki Matsumura, Hironobu Umemoto, Akira Izumi and Atsushi Masuda
Thin Solid Films 430 (1-2) 7 (2003)
https://doi.org/10.1016/S0040-6090(03)00072-5