Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Suppression of substrate oxidation during ozone based atomic layer deposition of Al2O3: Effect of ozone flow rate

Jinhee Kwon, Min Dai, Mathew D. Halls and Yves. J. Chabal
Applied Physics Letters 97 (16) (2010)
https://doi.org/10.1063/1.3500821

The initial mechanisms of Al2O3 atomic layer deposition on OH/Si(100)-2×1 surface by tri-methylaluminum and water

Manik Kumer Ghosh and Cheol Ho Choi
Chemical Physics Letters 426 (4-6) 365 (2006)
https://doi.org/10.1016/j.cplett.2006.05.126

Importance of Steric Effects in Cluster Models of Silicon Surface Chemistry:  ONIOM Studies of the Atomic Layer Deposition (ALD) of Al2O3 on H/Si(111)

Mathew D. Halls and Krishnan Raghavachari
The Journal of Physical Chemistry A 108 (15) 2982 (2004)
https://doi.org/10.1021/jp037014m

Atomic layer deposition of Al2O3 on H-passivated Si. I. Initial surface reaction pathways with H/Si(100)-2×1

Mathew D. Halls and Krishnan Raghavachari
The Journal of Chemical Physics 118 (22) 10221 (2003)
https://doi.org/10.1063/1.1571513