Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Defect-free periodic structures using extreme ultraviolet Talbot lithography in a table-top system

Wei Li, Victor Martinez Esquiroz, Lukasz Urbanski, et al.
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 31 (6) 06F604 (2013)
https://doi.org/10.1116/1.4826344

New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers

Przemyslaw W. Wachulak
Journal of Micro/Nanolithography, MEMS, and MOEMS 8 (2) 021206 (2009)
https://doi.org/10.1117/1.3129837