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Cited article:

In situx-ray photoelectron spectroscopy for thin film synthesis monitoring

M. A. Kelly, M. L. Shek, P. Pianetta, T. M. Gür and M. R. Beasley
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 19 (5) 2127 (2001)
https://doi.org/10.1116/1.1374618