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Cited article:

Investigations on TiN, TiC and Ti(CN) obtained by chemical vapor deposition

N. Popovska, C. Drothler, V.K. Wunder, H. Gerhard, G. Emig

J. Phys. IV France, 09 PR8 (1999) Pr8-437-Pr8-444

DOI: https://doi.org/10.1051/jp4:1999855

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