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Cited article:

LPCVD vertical furnace optimization for undoped polysilicon film deposition

A.M. Rinaldi, S. Carrà,, M. Rampoldi, M.C. Martignoni, M. Masi

J. Phys. IV France, 09 PR8 (1999) Pr8-189-Pr8-196

DOI: https://doi.org/10.1051/jp4:1999823

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