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Cited article:

LPCVD amorphous silicon carbide films, properties and microelectronics applications

I. Kleps, A. Angelescu

J. Phys. IV France, 09 PR8 (1999) Pr8-1115-Pr8-1122

DOI: https://doi.org/10.1051/jp4:19998139

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This article has been cited by the following article(s):

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