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Cited article:

RMPECVD of silica films in large scale microwave plasma reactor : Films properties

F. Naudin, P. Tristant, M.C. Hugon, I. Jauberteau, B. Agius, J. Desmaison

J. Phys. IV France, 09 PR8 (1999) Pr8-819-Pr8-826

DOI: https://doi.org/10.1051/jp4:19998104

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Characteristics of Microwave Discharge in a Modified Surfaguide with a Large Diameter

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Microwave plasma enhanced CVD of aluminum oxide films: OES diagnostics and influence of the RF bias

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