Articles citing this article

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The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Correlation between plasma conditions and properties of (Ti,Al)N coatings deposited by PECVD

O. Kyrylov, R. Cremer, D. Neuschütz and R. Prange
Surface and Coatings Technology 151-152 359 (2002)
https://doi.org/10.1016/S0257-8972(01)01653-X

Scattering of low-energy electrons by TiCl4, GeCl4, SiCl4and CCl4: a comparison of elastic cross sections

David L Azevedo, Márcio H F Bettega, Luiz G Ferreira and Marco A P Lima
Journal of Physics B: Atomic, Molecular and Optical Physics 33 (24) 5467 (2000)
https://doi.org/10.1088/0953-4075/33/24/301