Articles citing this article

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Cited article:

Piezoresistive Type Biosensor using a MEMS Cantilever for Detection of Tuberculosis

P. Sangeetha and A. Vimala Juliet
i-manager's Journal on Electronics Engineering 3 (2) 27 (2013)
https://doi.org/10.26634/jele.3.2.2119

Piezoelectric friction–inertia actuator—a critical review and future perspective

Z. M. Zhang, Q. An, J. W. Li and W. J. Zhang
The International Journal of Advanced Manufacturing Technology 62 (5-8) 669 (2012)
https://doi.org/10.1007/s00170-011-3827-z

Characterization of electrostatically coupled microcantilevers

M. Napoli, Wenhua Zhang, K. Turner and B. Bamieh
Journal of Microelectromechanical Systems 14 (2) 295 (2005)
https://doi.org/10.1109/JMEMS.2004.839349

A Capacitive Microcantilever: Modelling, Validation, and Estimation Using Current Measurements

Mariateresa Napoli, Bassam Bamieh and Kimberly Turner
Journal of Dynamic Systems, Measurement, and Control 126 (2) 319 (2004)
https://doi.org/10.1115/1.1767851