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Cited article:

Report on Brite-EuRam Project Sensors and Mechatronic Devices using Ferroelectric Thin Films SEMDEFT

P.B. Kirby, R.V. Wright, P. Gaucher, P. Galtier, L. Kofoed, J.O. Gulløv, W. Von Munch, D. Eichner, B. Ploss, J.K. Kruger

J. Phys. IV France, 08 PR9 (1998) Pr9-161-Pr9-169

DOI: https://doi.org/10.1051/jp4:1998929

PDF (3.748 MB)

This article has been cited by the following article(s):

In-plane excitation of thin silicon cantilevers using piezoelectric thin films

Glenn J. T. Leighton, Paul B. Kirby and Colin H. J. Fox
Applied Physics Letters 91 (18) 183510 (2007)
https://doi.org/10.1063/1.2805070