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This article has been cited by the following article(s):
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Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies
D. Sporn, P. Löbmann, U. Guntow and W. Glaubitt Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies 69 (2002) https://doi.org/10.1007/978-94-010-0353-7_4
Preparation of antiferroelectric PZT thin films on bare and on RuO2coated steel substrates