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Cited article:

Infrared absorption analysis of organosilicon/oxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonance

P. Raynaud, C. Marlière, D. Berthomieux, Y. Segui, J. Durand, R. Burke

J. Phys. IV France, 08 PR7 (1998) Pr7-265-Pr7-272

DOI: https://doi.org/10.1051/jp4:1998722

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This article has been cited by the following article(s):

Nitrogen fixation in pulsed microwave discharge studied by infrared absorption combined with modelling

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Plasma Sources Science and Technology 30 (6) 065007 (2021)
https://doi.org/10.1088/1361-6595/abff0e

FTIR Plasma Phase Analysis of Hexamethyldisiloxane Discharge in Microwave Multipolar Plasma at Different Electrical Powers

Patrice Raynaud, Bernard Despax, Yvan Segui and Hubert Caquineau
Plasma Processes and Polymers 2 (1) 45 (2005)
https://doi.org/10.1002/ppap.200400034