Articles citing this article

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Cited article:

Controlled drive-in and precipitation of hydrogen during plasma hydrogenation of silicon using a thin compressively strained SiGe layer

F. Okba, N. Cherkashin, Z. Di, et al.
Applied Physics Letters 97 (3) (2010)
https://doi.org/10.1063/1.3467455

Microstripline applicators for creating microplasma discharges with microwave energy

J J Narendra, T A Grotjohn and J Asmussen
Plasma Sources Science and Technology 17 (3) 035027 (2008)
https://doi.org/10.1088/0963-0252/17/3/035027

Investigation of stress-induced (100) platelet formation and surface exfoliation in plasma hydrogenated Si

Zengfeng Di, Yongqiang Wang, Michael Nastasi, et al.
Applied Physics Letters 91 (24) 244101 (2007)
https://doi.org/10.1063/1.2822414

Plasma etching of organic material: Combined effects of charged and neutral species

R. Murillo, F. Poncin-Epaillard and Y. Segui
The European Physical Journal Applied Physics 37 (3) 299 (2007)
https://doi.org/10.1051/epjap:2007031