Articles citing this article

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Cited article:

Optimization of selective laser etching (SLE) for glass micromechanical structure fabrication

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Optics Express 29 (15) 23487 (2021)
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Self-Biased-SMA Drive PU Microgripper with Force Sensing in Visual Servo

Ren-Jung Chang, Chih-Cheng Shiu and Chih-Yi Cheng
International Journal of Advanced Robotic Systems 10 (6) (2013)
https://doi.org/10.5772/56643

Local annealing of complex mechanical devices: a new approach for developing monolithic micro-devices

Y Bellouard, T Lehnert, J.-E Bidaux, et al.
Materials Science and Engineering: A 273-275 795 (1999)
https://doi.org/10.1016/S0921-5093(99)00418-9