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Cited article:

X-ray diffraction study of residual stresses and microstructure in tungsten thin films sputter deposited on polyimide

P. Villain, P. Goudeau, J. Ligot, et al.
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 21 (4) 967 (2003)
https://doi.org/10.1116/1.1578655