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Cited article:

Tris(diethylamino)silane—A new precursor compound for obtaining layers of silicon carbonitride

N. I. Fainer, A. N. Golubenko, Yu. M. Rumyantsev, et al.
Glass Physics and Chemistry 38 (1) 15 (2012)
https://doi.org/10.1134/S1087659612010051