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Cited article:

Silicon atomic layer growth using flash heating in CVD

M. SAKURABA, J. MUROTA, S. ONO

J. Phys. IV France, 03 C3 (1993) C3-449-C3-456

DOI: https://doi.org/10.1051/jp4:1993362

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This article has been cited by the following article(s):

Flash-Enhanced Atomic Layer Deposition: Basics, Opportunities, Review, and Principal Studies on the Flash-Enhanced Growth of Thin Films

Thomas Henke, Martin Knaut, Christoph Hossbach, et al.
ECS Journal of Solid State Science and Technology 4 (7) P277 (2015)
https://doi.org/10.1149/2.0301507jss