Articles citing this article

The Citing articles tool gives a list of articles citing the current article.
The citing articles come from EDP Sciences database, as well as other publishers participating in CrossRef Cited-by Linking Program. You can set up your personal account to receive an email alert each time this article is cited by a new article (see the menu on the right-hand side of the abstract page).

Cited article:

Automatic Defect Detection in Epitaxial Layers by Micro Photoluminescence Imaging

Jacopo Frascaroli, Marta Tonini, Selene Colombo, Luisito Livellara, Luca Mariani, Paolo Targa, Roberto Fumagalli, Viktor Samu, Mate Nagy, Gabor Molnar, Aron Horvath, Zoltan Bartal, Zoltan Kiss, Tamas Sipocz and Isabella Mica
IEEE Transactions on Semiconductor Manufacturing 35 (3) 540 (2022)
https://doi.org/10.1109/TSM.2022.3189847

An effective process to remove etch damage prior to selective epitaxial growth in 3D NAND flash memory

Liuyang Luo, Zhiyong Lu, Xingqi Zou, et al.
Semiconductor Science and Technology 34 (9) 095004 (2019)
https://doi.org/10.1088/1361-6641/ab3130

Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes

Nong Moon Hwang
Springer Series in Surface Sciences, Non-Classical Crystallization of Thin Films and Nanostructures in CVD and PVD Processes 60 163 (2016)
https://doi.org/10.1007/978-94-017-7616-5_7