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Cited article:

CVD EXHAUST - SAFETY AND ENVIRONMENTAL SANITY

M.L. HAMMOND

J. Phys. IV France, 02 C2 (1991) C2-449-C2-457

DOI: https://doi.org/10.1051/jp4:1991255

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This article has been cited by the following article(s):

Hazards of dichlorosilane exhaust deposits from the high-temperature oxide process as determined by FT-ICR mass spectrometry

R.L. Jarek and S.M. Thornberg
IEEE Transactions on Semiconductor Manufacturing 14 (1) 20 (2001)
https://doi.org/10.1109/66.909651