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Cited article:

A robust co-sputtering fabrication procedure for TiNi shape memory alloys for MEMS

C.-L. Shih, B.-K. Lai, H. Kahn, S.M. Phillips and A.H. Heuer
Journal of Microelectromechanical Systems 10 (1) 69 (2001)
https://doi.org/10.1109/84.911094