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Cited article:

Binary and ternary NiTi-based shape memory films deposited by simultaneous sputter deposition from elemental targets

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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films 23 (5) 1425 (2005)
https://doi.org/10.1116/1.2011404

A robust co-sputtering fabrication procedure for TiNi shape memory alloys for MEMS

C.-L. Shih, B.-K. Lai, H. Kahn, S.M. Phillips and A.H. Heuer
Journal of Microelectromechanical Systems 10 (1) 69 (2001)
https://doi.org/10.1109/84.911094

A three-dimensional shape memory alloy microelectrode with clipping structure for insect neural recording

S. Takeuchi and I. Shimoyama
Journal of Microelectromechanical Systems 9 (1) 24 (2000)
https://doi.org/10.1109/84.825773

A theory of thin films of martensitic materials withapplications to microactuatorsfn2fn2Dedicated to thememory of Juan Simo.

K. Bhattacharya and R.D. James
Journal of the Mechanics and Physics of Solids 47 (3) 531 (1999)
https://doi.org/10.1016/S0022-5096(98)00043-X