Journal de Physique IV

Preparation of β-SiC Coatings Using 1,2-Dimethyldisilane as Precursor

X. Tang, R. Haubner, B. Lux, A. Zechmann and E. Hengge

J. Phys. IV France, 05 C5 (1995) C5-777-C5-784

DOI: 10.1051/jphyscol:1995592

X. Tang

R. Haubner

B. Lux

A. Zechmann

E. Hengge

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