Journal de Physique IV

PE MOCVD of Thin High Transparent Dielectric Amorphous Films of Aluminium Oxide

V.P. Ovsyannikov, G.V. Lashkaryov and E.A. Mazurenko

J. Phys. IV France, 05 C5 (1995) C5-705-C5-709

DOI: 10.1051/jphyscol:1995585

V.P. Ovsyannikov

G.V. Lashkaryov

E.A. Mazurenko

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