Journal de Physique IV

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Properties of Surface Layers Produced from a Metalorganic Titanium Compound Under Glow Discharge Conditions

T. Wierzchon and J.R. Sobiecki

J. Phys. IV France, 05 C5 (1995) C5-699-C5-703

DOI: 10.1051/jphyscol:1995584

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