Journal de Physique IV

CVD Copper Deposition from Cu^I(HFAC)TMVS Studied Through a Modeling Experimental Design

J.-L. Mermet, M.-J. Mouche, F. Pires, E. Richard, J. Torres, J. Palleau and F. Braud

J. Phys. IV France, 05 C5 (1995) C5-517-C5-523

DOI: 10.1051/jphyscol:1995560

J.-L. Mermet

M.-J. Mouche

F. Pires

E. Richard

J. Torres

J. Palleau

F. Braud

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