Journal de Physique IV

Modelling of the Deposition of Molybdenum on Silicon from Molybdenum Hexafluoride and Hydrogen

E.N. Orij, M.H.J.M. de Croon and G.B. Marin

J. Phys. IV France, 05 C5 (1995) C5-331-C5-338

DOI: 10.1051/jphyscol:1995539

E.N. Orij

M.H.J.M. de Croon

G.B. Marin

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