Deposition of Oxide Layers by Computer Controlled"Injection-LPCVD" F. Felten, J.P. Senateur, F. Weiss, R. Madar et A. Abrutis J. Phys. IV France, 05 C5 (1995) C5-1079-C5-1086 DOI: 10.1051/jphyscol:19955127