Journal de Physique IV

Transmission Electron Microscopy Studies of (AIN-Si₃N₄) Codeposits Obtained by LPCVD

P. Marti, F. Henry, A. Mazel, B. Armas and J. Sevely

J. Phys. IV France, 05 C5 (1995) C5-905-C5-912

DOI: 10.1051/jphyscol:19955107

P. Marti

F. Henry

A. Mazel

B. Armas

J. Sevely

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