Journal de Physique IV

Thermochemical and Mass Transport Modelling of the Chemical Vapour Deposition of Si_1-xGe_x

M. Pons, E. Blanquet, C. Bernard, H. Rouch, J.M. Dedulle and R. Madar

J. Phys. IV France, 05 C5 (1995) C5-63-C5-70

DOI: 10.1051/jphyscol:1995504

M. Pons

E. Blanquet

C. Bernard

H. Rouch

J.M. Dedulle

R. Madar

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