Journal de Physique IV

Atmospheric pressure chemical vapour deposition of BPSG films from TEOS, 0₃, TMB, TMP_I: Determination of a chemical mechanism

J.-P. Nieto, B. Caussat, J.-P. Couderc, I. Orain' and L. Jeannerot

J. Phys. IV France, 12 4 (2002) 37-44

DOI: 10.1051/jp4:20020075

J.-P. Nieto

B. Caussat

J.-P. Couderc

I. Orain'

L. Jeannerot

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