Journal de Physique IV

Preliminary studies of atmospheric pressure plasma enhanced CVD (AP-PECVD) of thin oxide films

N. McSporran, M.L. Hitchman, S.E. Alexandrov, S.H. Shamlian, S. Turnbull and S. Turnbull

J. Phys. IV France, 12 4 (2002) 17-23

DOI: 10.1051/jp4:20020072

N. McSporran

M.L. Hitchman

S.E. Alexandrov

S.H. Shamlian

S. Turnbull

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