Journal de Physique IV

RMPECVD of silica films with a high microwave power (1600 W) parametric studies

P. Tristant, J. Desmaison, F. Naudin and D. Merle

J. Phys. IV France, 11 PR3 (2001) Pr3-771-Pr3-778

DOI: 10.1051/jp4:2001397

P. Tristant

J. Desmaison

F. Naudin

D. Merle

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