Journal de Physique IV

GeO₂ and SiO₂ thin film preparation with CVD using ultraviolet excimer lamps

K. Kurosawa, Y. Maezono, J.-I. Miyano, T. Motoyama and A. Yokotani

J. Phys. IV France, 11 PR3 (2001) Pr3-739-Pr3-745

DOI: 10.1051/jp4:2001393

K. Kurosawa

Y. Maezono

J.-I. Miyano

T. Motoyama

A. Yokotani

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