Journal de Physique IV

A TCAD tool for the simulation of the CVD process based on cellular automata

G.Ch. Sirakoulis, I. Karafyllidis and A. Thanailakis

J. Phys. IV France, 11 PR3 (2001) Pr3-205-Pr3-212

DOI: 10.1051/jp4:2001326

G.Ch. Sirakoulis

I. Karafyllidis

A. Thanailakis

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)