Journal de Physique IV

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Kinetics of LPCVD of aluminium nitride films based on pyrolysis of aluminium chloride complex

S.E. Alexandrov and V.A. Chistiakov

J. Phys. IV France, 11 PR3 (2001) Pr3-155-Pr3-161

DOI: 10.1051/jp4:2001319

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