Journal de Physique IV

Atmospheric pressure chemical vapour deposition of BPSG films from TEOS, O₃, TMB, TMP_i : Determination of a chemical mechanism

J.-P. Nieto, B. Caussat, J.-P. Couderc, I. Orain and L. Jeannerot

J. Phys. IV France, 11 PR3 (2001) Pr3-149-Pr3-154

DOI: 10.1051/jp4:2001318

J.-P. Nieto

B. Caussat

J.-P. Couderc

I. Orain

L. Jeannerot

Articles written by ALL the selected authors (AND)

Articles written by ANY OF the selected authors (OR)