Journal de Physique IV

Characterization of low-dielectric constant SiOCN films synthesized by low pressure chemical vapour deposition

L.M. Zambov, B. Ivanov, C. Popov, G. Georgiev, I. Stoyanov and D.B. Dimitrov

J. Phys. IV France, 11 PR3 (2001) Pr3-1005-Pr3-1012

DOI: 10.1051/jp4:20013126

L.M. Zambov

B. Ivanov

C. Popov

G. Georgiev

I. Stoyanov

D.B. Dimitrov

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