Journal de Physique IV

Characterisation of LPCVD silicon oxynitride films by optical spectroscopy

M. Bercu, C. Cobianu, M. Modreanu and B.N. Bercu

J. Phys. IV France, 11 PR3 (2001) Pr3-963-Pr3-969

DOI: 10.1051/jp4:20013121

M. Bercu

C. Cobianu

M. Modreanu

B.N. Bercu

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