Liquid-jet laser-plasma X-ray sources for microscopy and lithography H.M. Hertz, M. Berglund, B.A.M. Hansson, O. Hemberg et G.J. Johansson J. Phys. IV France, 11 PR2 (2001) Pr2-389-Pr2-396 DOI: 10.1051/jp4:2001275