Journal de Physique IV

Low pressure CVD of transparent Cu-Al-O and Cu-Ti-O thin films

D. Barreca, G.A. Battiston, U. Casellato, R. Gerbasi and E. Tondello

J. Phys. IV France, 11 PR11 (2001) Pr11-253-Pr11-260

DOI: 10.1051/jp4:20011141

D. Barreca

G.A. Battiston

U. Casellato

R. Gerbasi

E. Tondello

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