Journal de Physique IV

Preparation and characterization of some alumosiloxanes as single-source MOCVD precursors for aluminosilicate coatings

S.M. Zemskova, J.A. Haynes, T.M. Besmann, R.D. Hunt, D.B. Beach and V.N. Golovlev

J. Phys. IV France, 10 PR2 (2000) Pr2-35-Pr2-42

DOI: 10.1051/jp4:2000205

S.M. Zemskova

J.A. Haynes

T.M. Besmann

R.D. Hunt

D.B. Beach

V.N. Golovlev

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