Journal de Physique IV

CVD induced by ion beams for the preparation of oxide and nitride thin films

A.R. González-Elipe, J.P. Espinós, A. Barranco, F. Yubero and A. Caballero

J. Phys. IV France, 09 PR8 (1999) Pr8-699-Pr8-708

DOI: 10.1051/jp4:1999888

A.R. González-Elipe

J.P. Espinós

A. Barranco

F. Yubero

A. Caballero

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