Journal de Physique IV

Gas-phase FT-IR analysis and growth kinetics of Al₂O₃ in a LP-MOCVD reactor using new dialkylacetylacetonate precursors

G.A. Battiston, G. Carta, R. Gerbasi, M. Porchia, L. Rizzo and G. Rossetto

J. Phys. IV France, 09 PR8 (1999) Pr8-675-Pr8-681

DOI: 10.1051/jp4:1999885

G.A. Battiston

G. Carta

R. Gerbasi

M. Porchia

L. Rizzo

G. Rossetto

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