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OMVPE of GaN using (N₃)₂Ga[(CH₂)₃N(CH₃)₂] (BAZIGA) in a cold wall reactor

A. Devi, W. Rogge, R.A. Fischer, F. Stowasser, H. Sussek, H.W. Becker, J. Schäfer and J. Wolfrum

J. Phys. IV France, 09 PR8 (1999) Pr8-589-Pr8-595

DOI: 10.1051/jp4:1999874

A. Devi

W. Rogge

R.A. Fischer

F. Stowasser

H. Sussek

H.W. Becker

J. Schäfer

J. Wolfrum

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Copyright / Publiée par : EDP Sciences