Journal de Physique IV

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H-termination effects on initial growth characteristics of W on Si using WF₆ and SiH₄ gases

Y. Yamamoto, T. Matsuura and J. Murota

J. Phys. IV France, 09 PR8 (1999) Pr8-431-Pr8-436

DOI: 10.1051/jp4:1999854

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