Journal de Physique IV

Study of the precursor injection in a remote microwave PECVD reactor

L. Foucher, F. Naudin, P. Duverneuil, C. Tixier and J. Desmaison

J. Phys. IV France, 09 PR8 (1999) Pr8-141-Pr8-148

DOI: 10.1051/jp4:1999817

L. Foucher

F. Naudin

P. Duverneuil

C. Tixier

J. Desmaison

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